Integrated Circuit Structure and Method with Solid Phase Diffusion

ABSTRACT

The present disclosure provides a semiconductor structure. The semiconductor structure includes a fin active region formed on a semiconductor substrate and spanning between a first sidewall of a first shallow trench isolation (STI) feature and a second sidewall of a second STI feature; an anti-punch through (APT) feature of a first type conductivity; and a channel material layer of the first type conductivity, disposed on the APT feature and having a second doping concentration less than the first doping concentration. The APT feature is formed on the fin active region, spans between the first sidewall and the second sidewall, and has a first doping concentration.

PRIORITY DATA

The present application is a continuation application of U.S. patentapplication Ser. No. 16/218,547, filed Dec. 13, 2018, which is acontinuation application of U.S. patent application Ser. No. 15/657,397,filed Jul. 24, 2017, which is a continuation application of U.S. patentapplication Ser. No. 14/969,077, filed Dec. 15, 2015, each of which ishereby incorporated by reference in its entirety.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs.

Such scaling down has also increased the complexity of processing andmanufacturing ICs and, for these advances to be realized. Similardevelopments in IC processing and manufacturing are needed. For example,a three dimensional transistor, such as a fin-like field-effecttransistor (FinFET), has been introduced to replace a planar transistor.Furthermore, extreme ultraviolet lithography is also introduced forforming IC patterns. Although existing FinFET devices and methods offabricating FinFET devices have been generally adequate for theirintended purposes, they have not been entirely satisfactory in allrespects. For example, anti-punch-through implantation cannot beproperly implemented due to shadow effect, degradation of the mobilitydue to dopant residual in the channel region, and other concerns. Forexample, defects are introduced to the interface between the channel andshallow trench isolation features, and cause the leakage current,especially for the high mobility channel. Therefore, what is needed isthe structure for integrated circuit structure and the method making thesame to address the above issues.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a flowchart of an integrated circuit fabrication method inaccordance with some embodiments.

FIG. 2 is a perspective view of a semiconductor structure, constructedin accordance with some embodiments.

FIGS. 3A and 3B are sectional views of the semiconductor structure ofFIG. 2, along x and y directions, respectively, in accordance with someembodiments.

FIGS. 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16 and 17 are sectionalviews of the semiconductor structure at various fabrication stages,constructed in accordance with some embodiments.

FIG. 18 is a sectional view of the semiconductor structure of FIG. 17 inportion, constructed in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. For example, if the device in the figures is turned over,elements described as being “below” or “beneath” other elements orfeatures would then be oriented “above” the other elements or features.Thus, the exemplary term “below” can encompass both an orientation ofabove and below. The apparatus may be otherwise oriented (rotated 90degrees or at other orientations) and the spatially relative descriptorsused herein may likewise be interpreted accordingly.

The present disclosure is directed to, but not otherwise limited to, afin-like field-effect transistor (FinFET) device. The FinFET device, forexample, may be a complementary metal-oxide-semiconductor (CMOS) deviceincluding a P-type metal-oxide-semiconductor (PMOS) FinFET device and anN-type metal-oxide-semiconductor (NMOS) FinFET device. The followingdisclosure will continue with a FinFET example to illustrate variousembodiments of the present invention. It is understood, however, thatthe application should not be limited to a particular type of device,except as specifically claimed.

FIG. 1 is a flowchart of a method 100 for fabricating a semiconductorstructure (particularly including a FinFET structure having one or moreFinFET devices) 200, constructed in accordance with some embodiments. Inaccordance with some embodiments, FIG. 2 is a perspective view of thesemiconductor structure 200; FIGS. 3A and 3B are sectional views of thesemiconductor structure 200 along x and y directions, respectively;FIGS. 4 through 17 are sectional views of the semiconductor structure200 at various fabrication stages; and FIG. 18 is a sectional view ofthe semiconductor structure 200 of FIG. 17 in portion. It is understoodthat additional steps may be implemented before, during, and after themethod, and some of the steps described may be replaced or eliminatedfor other embodiments of the method. The semiconductor structure 200 andthe method 100 making the same are collectively described with referenceto various figures.

Referring to FIGS. 1, 2, 3A and 3B, the method 100 begins at 102 byproviding a semiconductor structure 200 having a substrate 210 andforming fin active regions 216 on the semiconductor substrate 210. Thesubstrate 210 includes a first region for NMOS (also referred to as aNMOS region) 212 and a second region for PMOS (also referred to as aPMOS region) 214. In the present embodiment, the substrate 210 is a bulksilicon substrate. In furtherance of the present embodiment, thesubstrate 210 is a silicon wafer. In some embodiments, the substrate 210may include an elementary semiconductor, such as germanium in acrystalline structure; a compound semiconductor, such as silicongermanium, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide; or combinationsthereof. In furtherance of the embodiments, those semiconductor materialfilms may be epitaxially grown on the silicon wafer.

In another embodiment, the substrate 210 has a silicon-on-insulator(SOI) structure with an insulator layer in the substrate. An exemplaryinsulator layer may be a buried oxide layer (BOX). The SOI substrate maybe fabricated using separation by implantation of oxygen (SIMOX), waferbonding, and/or other suitable methods. The substrate 210 may includevarious doped features depending on design requirements as known in theart. The doped features may be doped with p-type dopants, such as boron;n-type dopants, such as phosphorus or arsenic; or combinations thereof.The doped features may be formed by ion implantations.

One or more fin active regions (fins) 216 are formed on the substrate210. The fins 216 include a semiconductor material, as active regions.In some embodiments, the fins 216 include silicon and are extended fromthe substrate 210 as a part of the substrate 210. In some otherembodiments, the fins 216 additionally or alternatively include othersemiconductor material, such as silicon germanium and/or siliconcarbide, formed by a suitable technique, such as epitaxy growth. The finactive regions 216 may have various semiconductor materials anddifferent structure for enhanced device performance, such as highmobility channel. In some examples, the fin active regions 216 mayinclude silicon, silicon germanium, strained silicon on insulator(SSOI), germanium on insulator (GOI), or a combination thereof.

The semiconductor structure 200 also includes various isolation features218 disposed on the substrate 210 and horizontally surround the finfeatures 216. In the present embodiments, the isolation features 218 areshallow trench isolation (STI) features 218 and include one or moredielectric materials, such as silicon oxide, low-k dielectric material,air gap, other suitable dielectric materials, or a combination thereof.

In some embodiments, the fins 216 are formed by any suitable procedureincluding deposition, photolithography, and/or etching processes. In oneembodiment, the fins 216 and the STI features 218 are collectivelyformed by a procedure that includes patterning the substrate 210 to formtrenches, filling the trenches with one or more dielectric material, andpolishing the substrate 210 to remove excessive dielectric material andplanarize the top surface. In furtherance of the embodiment, thepatterning the substrate 210 may include forming a hard mask andapplying an etch process to the substrate 210 through the openings ofthe hard mask to form trenches in the substrate 210. The hard mask maybe formed by a procedure that includes depositing a hard mask materiallayer and etching the hard mask material layer. In some examples, thehard mask material layer includes a silicon oxide and a silicon nitridesubsequently deposited on the substrate 210. The hard mask layer 212 maybe formed by thermal oxidation, chemical vapor deposition (CVD), atomiclayer deposition (ALD), or any other appropriate method. The procedureto form the hard mask further includes forming a patterned photoresist(resist) layer by a lithography process, and etching the hard maskmaterial layer through the openings of the patterned resist layer totransfer the openings to the hard mask material layer. An exemplaryphotolithography process may include forming a resist layer, exposingthe resist by a lithography exposure process, performing a post-exposurebake process, and developing the photoresist layer to form the patternedphotoresist layer. The lithography process may be alternatively replacedby other technique, such as e-beam writing, ion-beam writing, masklesspatterning or molecular printing. In some other embodiments, thepatterned resist layer may be directly used as an etch mask for the etchprocess to form the trenches.

The fin active regions 216 within the first region 212 may be referredto as n-type fin features because the semiconductor material therein isdoped appropriately to form an n-type transistor. Specifically, thesemiconductor material is doped with a p-type dopant such as boron.Similarly, the fin active regions 216 within the second region 214 maybe referred to as p-type fin features because they will ultimately bedoped appropriately to form a p-type transistor. Specifically, they willbe doped with an n-type dopant such as phosphorous.

The semiconductor structure 200 includes various devices, such aslogical devices and I/O devices. In various semiconductor devices,different transistors may have different sizes. According to anillustrated example, a first n-type fin feature 216 within the firstregion 212 has a first dimension L1 to form a short channel transistor(e.g., a high performance logic transistor); a second n-type fin feature216 within the first region 212 has a second dimension L2 to form amiddle channel transistor (e.g., a standby transistor); and a thirdn-type fin feature 216 within the first region 212 has a third dimensionL3 to form a long channel transistor (e.g., a I/O transistor). Thosedimensions are different: L1<L2 and L2<L3. Similarly according to anillustrated example, a first p-type fin feature 216 within the secondregion 214 has a fourth dimension L4 to form a short channel transistor;a second p-type feature 216 within the second region 214 has a fifthdimension L5 to form a middle channel transistor; and a third p-typefeature 216 within the second region 214 has a sixth dimension L6 toform a long channel transistor. Those dimensions are different: L4<L5and L5<L6. However, the semiconductor structure 200 may includetransistors with more or less sizes.

Referring to FIGS. 1 and 4, the method 100 includes an operation 104 toform a first patterned mask 220. The pattern mask 220 covers the secondregion 214 and has the openings to expose the first region 212. In someembodiments, the patterned mask 220 is a hard mask and includes adielectric material, such as silicon oxide, silicon nitride, siliconoxynitride, other suitable dielectric material or a combination thereof.For example, the hard mask may include more than one material layer,such as a silicon oxide film and a silicon nitride film on the siliconoxide film. In some examples, the formation of the hard mask includesdepositing a hard mask material layer; forming a patterned resist layeron the hard mask material layer by lithography; and transferring thepattern from the patterned resist layer to the hard mask material layerby etching; and removing the patterned resist layer by wet stripping orplasma ashing. Alternatively, the patterned mask 220 may be a patternedresist layer formed by lithography.

Referring to FIGS. 1 and 5, the method 100 includes an operation 106 torecess the fin features 216 within the first region 212 by etching. Theetching process is designed to selectively remove the semiconductormaterial(s) in the fin active regions 216 while the STI features remain.The etching process may include dry etch, wet etch or a combination. Thepatterned mask 220 protects the fin features 216 within the secondregion 214 form etching. Because of the loading effect of the etchingprocess, the fin features 216 that are larger will be etched morequickly than the smaller fin features 216. Specifically, because thethree n-type features 216 have dimensions L1, L2 and L3, respectively,the corresponding recessed depths (D1, D2, and D3) are different.Particularly, D1 is less than D2 and D2 is less than D3. Thus, at laterstage, anti-punch-through (APT) doping features are formed in therespective n-type fin features at different levels. The etching processis designed with a suitable etch duration and an etch rate such that thedepths (D1, D2 and D3) are within the desired ranges.

Referring to FIGS. 1 and 6, the method 100 proceeds to operation 108 byforming a first dopant-containing dielectric material layer 222 having afirst-type dopant. Particularly, the first dopant-containing dielectricmaterial layer 222 is formed in the recessed fin features and thesidewalls of the STI features 218 within the first region 212. In thepresent embodiment, the first type dopant is a p-type dopant. In someembodiments, the operation 106 includes depositing a borosilicate glass(boron-doped-glass or BSG) layer 228 containing p-type dopant. The BSGlayer 222 functions as a solid source for the p-type dopant to beintroduced to the n-type fin features 216 within the first region 212.The concentration of the p-type dopant in the BSG layer 222 is designedsuch that to introduce the p-type dopant with a proper dopingconcentration during one or more subsequent thermal process. In someembodiments, the dopant concentration of the BSG layer 222 ranges fromabout 1021/cm3 to about 8×1021/cm3. The BSG layer 222 is formed by asuitable technique, such as CVD with suitable precursor. In someexamples, the precursor to form the BSG layer 222 by CVD includes SiH4,O2, and B2H6.

In some embodiments, the operation 108 further includes depositing anun-doped silicate glass (USG) layer on the BSG layer. In this case, theUSG layer and the BSG layer are collectively referred to by the numeral222. The USG layer is a capping layer to protect the BSG layer. Variousmaterial layers may be formed by suitable technology, such as CVD. Insome examples, the BSG layer has a thickness ranging between 0.5 nm and2 nm; and the USG layer has a thickness ranging between of 1 nm and 4nm.

Referring to FIGS. 1 and 7, the method 100 proceeds to operation 110 todrive the dopant from the BSG layer to the recessed fin features (thatare the n-type fin features 216 within the first region 212), therebyforming APT features 224 of p-type conductivity (also referred to asp-type APT features) in the recessed fin features. The operation 110 mayinclude one or more thermal process to drive the dopant from the BSGlayer to the recessed fin features. The thermal process is designed withproper annealing temperature and annealing duration. In some examples,the thermal annealing process may be implemented in a rapid thermalannealing apparatus. Thus formed p-type APT features 224 are positionedat different levels but with a same thickness, which is determined bythe dopant concentration of the BSG layer and the thermal annealingprocess (including annealing temperature and annealing duration). Insome examples, the p-type APT features 224 are formed to have athickness within a range of about 5-10 nanometers. In one example, theconcentration of the p-type dopant for the APT features 224 is within arange of about 1×1017/cm3-1×1018/cm3. The dopant concentration of theAPT features 224 is greater than that of the channel layer that is to beformed at a later stage, as described below. The p-type APT features 224are not formed in the second region 214 since the hard mask 220 preventsthe diffusion of the dopant from the BSG layer to the fin features inthe second region 214.

Additionally, the dopant is also driven into the STI features 218, suchas into surfaces of the STI features. The doped surfaces of the STIfeatures extend from the fin features 216 to the top surfaces of the STIfeatures within the first region 212, as illustrated in FIG. 7. The STIfeatures with doped surfaces help enhance device performance, such aseliminating the leakage by junction isolation effect, and reducingfaucet issue associated with epitaxy growth. The doped surfaces of theSTI features 218 within the first region 212 are extended portions ofthe APT features 224 and will be discussed later.

Referring to FIGS. 1 and 8, the method 100 proceeds to operation 112 toremove the first dopant-containing dielectric material layer 222, whichis the BSG layer in the present embodiment. In some embodiments, the USGlayer is removed as well when it is present. The removal of the firstdopant-containing dielectric material layer is by a suitable etchingprocess. For example, the BSG layer (and the USG layer) is removed by awet etch using diluted hydrofluoric acid (DHF) solution. In theoperation 112, the hard mask 220 is removed as well according to thepresent embodiment. For example, the hard mask 220 of silicon nitridemay be removed by a wet etch using (hot) phosphorous acid.

Particularly, the doped surfaces, labeled as 224A in FIG. 8, of the STIfeatures 218 within the first region 212 have different heights indifferent regions, such as short channel region and long channel region.The doped surfaces 224A are p-type doped.

Referring to FIGS. 1 and 9, the method 100 proceeds to operation 114 toform channel material layer 226 in the trenches within the first region212. The channel material layer 226 includes a semiconductor materialepitaxially grown in the trenches and doped with p-type dopant, such asboron. Since the APT features 224 are at different levels and thechannel material layer 226 has a planarized surface, the channelmaterial layer 226 on the different fin features has differentthicknesses, as illustrated in FIG. 9.

In some embodiments, the semiconductor material in the channel materiallayer 226 is different from that of the substrate 210 for variousconsiderations, such as strain effect for high mobility or using asemiconductor material of high mobility. In various examples, thechannel material layer 226 includes silicon, silicon germanium,germanium, silicon germanium tin (SiGeSn), germanium tin (GeSn), or acompound semiconductor material from III-V groups. In exemplaryembodiments, the compound semiconductor material from III-V groupsincludes Gallium arsenide, Gallium arsenide phosphide, Gallium nitride,Gallium phosphide, Indium arsenide, Indium gallium arsenide, Indiumgallium nitride, Indium gallium phosphide, Indium nitride, Indiumphosphide, Aluminium arsenide, Aluminium gallium arsenide, Aluminiumgallium indium phosphide, Aluminium gallium nitride, Aluminium galliumphosphide, Aluminium indium arsenide, Aluminium nitride, Aluminiumphosphide, or a combination thereof. In further examples, the channelmaterial layer 226 may include two or more semiconductor material films.

In some embodiments, the formation of the channel material layer 226includes epitaxy growth, and chemical mechanical polishing (CMP). Thechannel material layer 226 is doped with the first type dopant (p-typedopant in the present example), same to that of the APT features 224 butwith a different doping concentration. Particularly, the dopingconcentration of the channel material layer 226 is less than the dopingconcentration of the APT features 224. The dopant in the channelmaterial layer 226 is designed for proper threshold voltage of thecorresponding transistor and other consideration, such as leakagecurrent. In various embodiments, the dopant is introduced to the channelmaterial layer 226 by in-situ doping or ion implantation. For in-situdoping, the precursor of the epitaxy growth additionally includes adopant-containing chemical. Therefore, the dopant is introduced to thechannel material layer 226 during the epitaxy growth.

In the present embodiment, the faucet issue of the epitaxy growth iseliminated or reduced. Faucet issue refers to a gap is formed betweenthe epitaxy feature and the STI feature during epitaxy growth due to thegrowth selectivity. By forming doped surfaces of the STI features 218during the formation of the APT features 224 (through the operations106-110), the surfaces of the STI features 218 is modified. Theselectivity of the epitaxy growth is reduced so that the channelsemiconductor material is also grown on the sidewalls of the STIfeatures, thereby eliminating or reducing the faucet issue.

Referring to FIGS. 1 and 10, the method 100 proceeds to operation 116 toform a second patterned mask 228 on the substrate 210. The second hardmask covers the first region 212 and has one or more opening such thatthe second region 214 is exposed within the opening. In someembodiments, the patterned mask 228 is a hard mask and includes adielectric material, such as silicon oxide, silicon nitride, siliconoxynitride, other suitable dielectric material or a combination thereof.The hard mask 228 may include more than one material layer, such as asilicon oxide film and a silicon nitride film on the silicon oxide film.In some examples, the formation of the hard mask includes depositing ahard mask material layer; forming a patterned resist layer on the hardmask material layer by lithography; and transferring the pattern fromthe patterned resist layer to the hard mask material layer by etching;and removing the patterned resist layer by wet stripping or plasmaashing. Alternatively, the patterned mask 228 may be a patterned resistlayer formed by lithography.

Referring to FIGS. 1 and 11, the method 100 includes an operation 118 torecess the fin features 216 within the second region 214 by etching. Theetching process is designed to selectively remove the semiconductormaterial(s) in the fin active regions 216 while the STI features remain.The etching process may include dry etch, wet etch or a combination. Thepatterned mask 228 protects the fin features 216 within the first region212 form etching. Due to the loading effect of the etching process, thefin features 216 that are larger will be etched more quickly than thesmaller fin features 216. Specifically, because the three p-typefeatures 216 have dimensions L4, L5 and L6, respectively, thecorresponding recessed depths (D4, D5, and D6) are different.Particularly, D4 is less than D5 and D5 is less than D6. Thus, at laterstage, anti-punch-through (APT) doping features are formed in therespective n-type fin features at different levels. The etching processis designed with a suitable etch duration and an etch rate such that thedepths (D1, D2 and D3) are within the desired ranges.

Referring to FIGS. 1 and 12, the method 100 proceeds to operation 120 byforming a second dopant-containing dielectric material layer 230 havinga second-type dopant, which is opposite to the first-type dopant inconductivity. In the present embodiment, the second type dopant is ann-type dopant. Particularly, the second dopant-containing dielectricmaterial layer 230 is formed in the recessed fin features and thesidewalls of the STI features 218 within the second region 214. In someembodiments, the operation 120 includes depositing a phosphosilicateglass (phosphorous-doped-glass or PSG) layer 230 containing n-typedopant. The PSG layer 230 functions as a solid source for the n-typedopant to be introduced to the p-type fin features 216 within the secondregion 214. The concentration of the n-type dopant in the PSG layer 230is designed such that to introduce the p-type dopant with a properdoping concentration during one or more subsequent thermal process. Insome embodiments, the dopant concentration of the PSG layer 230 rangesfrom about 1021/cm3 to about 8×1021/cm3. The PSG layer 230 is formed bya suitable technique, such as CVD with suitable precursor. In someexamples, the precursor to form the PSG layer 230 by CVD includes SiH4,O2, and PH3.

In some embodiments, the operation 120 further includes depositing anUSG layer on the PSG layer 228 and depositing a silicon nitride layer232 on the USG layer. In this case, the USG layer and the PSG layer arecollectively referred to by the numeral 230. The USG layer is a cappinglayer to protect the PSG layer. The USG layer may be formed by suitabletechnology, such as CVD. In some examples, the PSG layer has a thicknessranging between 0.5 nm and 2 nm; and the USG layer has a thicknessranging between of 1 nm and 4 nm.

Referring to FIGS. 1 and 13, the method 100 proceeds to operation 122 todrive the second dopant from the PSG layer to the recessed fin features(that are the p-type fin features 216 within the second region 214),thereby forming APT features 224 of n-type conductivity (also referredto as n-type APT features) in the recessed fin features. The operation122 may include one or more thermal process to drive the dopant from thePSG layer to the recessed fin features. The thermal process is designedwith proper annealing temperature and annealing duration. In someexamples, the thermal annealing process may be implemented in a rapidthermal annealing apparatus. Thus formed n-type APT features 232 arepositioned at different levels but with a same thickness, which isdetermined by the dopant concentration of the PSG layer and the thermalannealing process (including annealing temperature and annealingduration). In some examples, the n-type APT features 232 are formed tohave a thickness within a range of about 5-10 nanometers. In oneexample, the concentration of the n-type dopant for the APT features 232is within a range of about 1×1017/cm3-1×1018/cm3. The dopantconcentration of the APT features 232 is greater than that of thechannel layer that is to be formed at later stage, as described below.The n-type APT features 232 are not formed in the first region 212 sincethe hard mask 228 prevents the diffusion of the dopant from the PSGlayer to the fin features in the first region 212.

Additionally, the dopant is also driven into the STI features 218, suchas into surfaces of the STI features 218 in the second region 214. Thedoped surfaces of the STI features extend from the fin features 216 tothe top surfaces of the STI features 218 within the second region 214,as illustrated in FIG. 13. The STI features with doped surfaces helpenhance device performance, such as eliminating the leakage by junctionisolation effect, and reducing faucet issue associated with epitaxygrowth.

Referring to FIGS. 1 and 14, the method 100 proceeds to operation 124 toremove the second dopant-containing dielectric material layer 230, whichis the PSG layer in the present embodiment. In some embodiments, the USGlayer is removed as well when it is present. The removal of the seconddopant-containing dielectric material layer is by a suitable etchingprocess. For example, the PSG layer (and the USG layer) is removed by awet etch using DHF solution. In the operation 124, the hard mask 228 isremoved as well according to the present embodiment. For example, thehard mask 228 of silicon nitride may be removed by a wet etch using(hot) phosphorous acid.

Particularly, the doped surfaces, labeled as 232A in FIG. 14, of the STIfeatures 218 within the second region 214 have different heights indifferent regions, such as short channel region and long channel region.The doped surfaces 232A are n-type doped.

Referring to FIGS. 1 and 15, the method 100 proceeds to operation 126 toform channel material layer 234 in the trenches within the second region212. The channel material layer 234 includes a semiconductor materialepitaxially grown in the trenches and doped with n-type dopant, such asphosphorous. Since the APT features 232 are at different levels, thechannel material layer may have different heights on different finfeatures and therefore an uneven profile. A polish, such as CMP, may beapplied to the channel material layer 234 to planarize the top surface.In this case, the hard mask 228 may serve as a polish stop layer duringthe polish and be removed by polishing or by etching thereafter. As thechannel material layer 234 has a planarized surface, the channelmaterial layer 234 on the different fin features has differentthicknesses, as illustrated in FIG. 15. Furthermore, the

In some embodiments, the semiconductor material in the channel materiallayer 234 is different from that of the substrate 210 for variousconsiderations, such as strain effect for high mobility or using asemiconductor material of high mobility. In various examples, thechannel material layer 226 includes silicon, silicon germanium,germanium, silicon germanium tin (SiGeSn), germanium tin (GeSn), or acompound semiconductor material from III-V groups. In exemplaryembodiments, the compound semiconductor material from III-V groupsincludes Gallium arsenide, Gallium arsenide phosphide, Gallium nitride,Gallium phosphide, Indium arsenide, Indium gallium arsenide, Indiumgallium nitride, Indium gallium phosphide, Indium nitride, Indiumphosphide, Aluminium arsenide, Aluminium gallium arsenide, Aluminiumgallium indium phosphide, Aluminium gallium nitride, Aluminium galliumphosphide, Aluminium indium arsenide, Aluminium nitride, Aluminiumphosphide, or a combination thereof. In further examples, the channelmaterial layer 226 may include two or more semiconductor material films.

In some embodiments, the channel material layer 234 includes asemiconductor material different from that of the channel material layer226 within the first region 212. For examples, the first channelmaterial layer 226 in the first region 212 for n-type transistorsincludes a first semiconductor material that has a relative higherelectron mobility while the second channel material layer 234 in thesecond region 214 for p-type transistors includes a second semiconductormaterial that has a relative higher hole mobility. In furtherance of theexamples, the first channel material layer 226 in the first region 212for n-type transistors includes gallium arsenic or indium phosphorouswhile the second channel material layer 234 in the second region 214 forp-type transistors includes germanium or diamond.

Referring to FIGS. 1 and 16, the method 100 proceeds to operation 128 torecess the STI features 218. The operation 128 may include one or moreetching process to selectively etch back the STI features 218, therebyforming recessed STI features. For examples, the operation 128 includeswet etch, dry etch, or a combination thereof. In furtherance of theexamples, the operation 128 includes a wet etching process using DHFsolution as etchant. The fin features 216, especially the channelmaterial layers 226 in the firsts region 212 and the channel materiallayer 234 in the second region 214 extend above the recessed STIfeatures 218.

Referring to FIGS. 1 and 17, the method 100 proceeds to operation 130 toform, on the fin features 216, various semiconductor devices, such asfield effect transistors (FETs), dipole transistors, diodes, passivedevices (resistors, inductors, capacitors or a combination thereof) or acombination thereof. In the present embodiment illustrated in FIG. 17,exemplary field effect transistors 236 are formed on the fin features216, and therefore are referred to as fin FETs (FinFETs). Particularly,each FinFET 236 includes source and drain features, and a gate stack 238interposed between the source and drain features. Particularly, n-typeFinFETs are formed on the fin features 216 within the first region 212and p-type FinFETs are formed on the fin features 216 within the secondregion 214. One or more FinFETs may be formed on each fin feature. Thestructure and formation of the FinFETs 236 are further described below.

In the semiconductor structure, the p-doped surfaces 224A and then-doped surfaces 232A are portions of the STI features 218. The dopedsurfaces are configured surrounding the corresponding channel materiallayers. Specifically, the p-doped surfaces 224A are surrounding thechannel material layer 226 in the first region 212; and the n-dopedsurfaces 232A are surrounding the channel material layer 234 in thesecond region 214. As noted above, the doped surfaces help enhancedevice performance, such as eliminating the leakage by junctionisolation effect, and reducing faucet issue associated with epitaxygrowth. Especially, doped surfaces have different heights. The dopedsurfaces vertically extended from the bottom of the corresponding APTfeatures to the top of the STI features. Since the APT features are atdifferent levels, therefore the doped surfaces have different heights.

FIG. 18 is a sectional view of the semiconductor structure 200 inportion, constructed in accordance with some embodiments. In FIG. 18,the active region is designed to form a FET, such as a p-type FET (pFET)or an n-type FET (nFET). In some embodiments, a doped well 240 may beformed in the substrate, such as after the formation the STI features218 and prior to the formation of the APT features. In the presentexample, only one exemplary fin feature 216 and the correspondingFinFETs 236 in the first region 212 are illustrated In FIG. 18. Thedescriptions are applied to the first region 212 and the correspondingfeatures. However, the portion of the semiconductor structure 200 in thesecond region 214 is similar but with opposite type of conductive.

The semiconductor structure 100 includes a semiconductor substrate 110.In some examples, the doped well 240 is a p-type well and includes ap-type dopant, such as boron (B), distributed in an active region wherenFET(s) is to be formed. The dopant may be introduced to the p-well 240through an opening of the mask layer by a suitable doping process, suchas one or more ion implantation. In one example, the doped well 240 mayhave a corresponding doping concentration ranging between about 1016 and1018 cm-3. In another example, the doped well 240 may have a depthranging between about 0.5 micrometers and 2 micrometers. The APTfeatures 224 and the channel material layer 226 are formed in the finfeature. The channel material layer 226 serves as a conductive path whenthe corresponding FinFET(s) are turned on during operations. Similarly,in the second region 214, an n-type well is formed and includes a n-typedopant (such as phosphorous) distributed in an active region wherepFET(s) are to be formed. The APT features 232 and the channel materiallayer 234 are formed in the fin feature within the second region 214.

Each FinFET 236 includes a gate stack 238 formed on channel materiallayer 226, and source and drain features 242 formed in the channelmaterial layer. The gate stack 238 includes a gate dielectric feature238A disposed on the channel material layer 226 and a gate electrode238B disposed on the gate dielectric feature 238A. The gate stack 238may further include gate spacers 238C disposed on sidewalls of the gateelectrode 238A.

The gate dielectric feature 238A includes a gate dielectric material,such as silicon oxide or a suitable dielectric material having a higherdielectric constant (high-k dielectric material). In the presentembodiment, the gate dielectric feature 238A includes more than onedielectric material layers. For example, the gate dielectric feature238A includes an interfacial dielectric layer, such as silicon oxide,and a high-k dielectric material layer on the interfacial layer.

The gate electrode 238B includes a conductive material layer, such asdoped polysilicon, metal, metal alloy, metal silicide, or a combinationthereof. In some embodiments, the gate electrode 238B includes more thanone conductive material layers. For example, the gate electrode 238Bincludes a first conductive layer having a suitable work function on thegate dielectric feature 238A and a second conductive layer on the firstconductive layer. In one example for the n-type FinFET, the firstconductive layer includes titanium or titanium aluminum. In anotherexample, the second conductive layer includes aluminum, tungsten,copper, doped polysilicon or a combination thereof.

Similarly, the gate stacks in the second region 214 also includes a gatedielectric layer and a gate electrode. The gate electrode in the secondregion 214 may have a similar structure as that of the gate stack in thefirst region 212. However, the conductive material(s) may be different.For examples, in the second region 214, the gate electrode includes afirst conductive material layer (such as tantalum nitride or titaniumnitride), and a second conductive material layer (such as aluminum,tungsten, copper, doped polysilicon or a combination thereof).

The gate stack 238 is formed by a procedure that includes variousdeposition processes and patterning. The formation of the gate stack 238is further described in accordance with some embodiments. In oneembodiment, an interfacial layer is formed on the semiconductorsubstrate (particularly, on the channel material layer 226. Theinterfacial layer may include silicon oxide formed by a propertechnique, such as an atomic layer deposition (ALD), thermal oxidationor UV-Ozone Oxidation. The interfacial layer may have a thickness lessthan 10 angstrom. A high k dielectric material layer is formed on theinterfacial layer. The high-k dielectric layer includes a dielectricmaterial having the dielectric constant higher than that of thermalsilicon oxide, about 3.9. The high k dielectric material layer is formedby a suitable process such as ALD or other suitable technique. Othermethods to form the high k dielectric material layer include metalorganic chemical vapor deposition (MOCVD), physical vapor deposition(PVD), UV-Ozone Oxidation or molecular beam epitaxy (MBE). In oneembodiment, the high k dielectric material includes HfO2. Alternatively,the high k dielectric material layer includes metal nitrides, metalsilicates or other metal oxides. The interfacial layer and the high kdielectric material layer constitute the gate dielectric layer.

In some embodiments, the gate electrode 238B includes polysilicon. Apolysilicon layer is formed on the gate dielectric layer by a propertechnique, such as CVD. In one example, a capping layer may be furtherformed between the high k dielectric material layer and the polysiliconlayer by a proper technique, such as PVD. The capping layer may includetitanium nitride (TiN), tantalum nitride (TaN) or a combination thereofin some examples. The capping layer may serve one or more functions,such as diffusion barrier, etch stop, and/or protection.

After the depositions, the gate material layers are patterned to formthe gate stack 238 (or a plurality of gate stacks). The patterning ofthe gate stack 238 includes a lithography process and etching. Alithography process forms a patterned resist layer. In one example, thelithography process includes resist coating, soft baking, exposing,post-exposure baking (PEB), developing, and hard baking. The gate stackmaterial layers are thereafter patterned by etching using the patternedresist layer as an etching mask. The etching process may include one ormore etching steps. For example, multiple etching steps with differentetchants may be applied to etch respective gate stack material layers.

In other embodiments, the patterning of the gate stack material layersmay alternatively use a hard mask as an etching mask. The hard mask mayinclude silicon nitride, silicon orynitride, silicon oxide, othersuitable material, or a combination thereof. A hard mask layer isdeposited on the gate stack material layers. A patterned resist layer isformed on the hard mask layer by a lithography process. Then, the hardmask is etched through the opening of the patterned resist layer,thereby forming a patterned hard mask. The patterned resist layer may beremoved thereafter using a suitable process, such as wet stripping orplasma ashing.

The gate spacers 238C include a dielectric material and may have one ormore films. In some embodiments, the fate spacers 238C include siliconoxide, silicon nitride, silicon oxynitride, other suitable dielectricmaterial, or a combination thereof. The gate spacers 238C are formed bydeposition and anisotropic etch (such as dry etch).

In some embodiments, the source and drain features 242 may furtherinclude light-doped drain (LDD) features formed in the fin feature 216by a suitable process, such as ion implantation. The LDD features have adoping type opposite to that of the doped well 240. For example for annFET, the doped well 240 is p-type and the LDD features are n-type. Inanother example for a pFET, the doped well is n-type and the LDDfeatures are p-type. The LDD features and the gate stack 238 may beformed in a collective procedure. For examples, the gate stack materiallayers are deposited and patterned to form the gate dielectric layer andgate electrode layer; the LDD features are formed by ion implantationusing the dummy gate stack (and STI features) to constrain the LDDfeatures; and then the spacers are formed. In other embodiments, the LDDfeatures are optional and may be eliminated from the semiconductorstructure 200.

In some alternative embodiments, the gate stack 238 may be formed by agate replacement process. The gate replacement process include forming adummy gate; forming source and drain features; removing the dummy gate;and thereafter forming a final gate that includes a gate dielectriclayer of a high k dielectric material and a metal gate electrode. Invarious embodiments, the gate replacement process may be a high—k-lastprocess, in which both the gate dielectric layer and the gate electrodein the dummy gate are removed and replaced by the final gate stack.

In some alternative embodiments, the source and drain features 242 havedifferent semiconductor material for strained effect and may be formedby a procedure that includes recessing the source and drain regions byetching; and filling the recesses with a different semiconductor(different from the channel material) by epitaxial growth. In someembodiments, the semiconductor material is chosen for proper strainedeffect in the channel region such that the corresponding carriermobility is increased. For example, the semiconductor material for thesource and drain features includes silicon carbide or silicon germanium.In one example, the FinFET 236 in the first region 212 is an nFET, thesemiconductor material is silicon carbide doped with phosphorous. In oneexample, the FinFET device in the second region 214 is a pFET, thesemiconductor material is silicon germanium doped with boron. In someembodiments, two or more FinFETs 236 are formed on a same fin feature216. In the present example illustrated in FIG. 18, two FinFETs 236 areformed on the same fin feature 216 and share and a common source.

Note that the doping type of the p-type doped well 240 is same to thedoping type of the APT feature 224 but the doping concentration of thedoped well 240 is less than the doping concentration of the APT feature224. Furthermore, the doping type of the channel material layer 226 issame to the doping type of the APT feature 224 but the dopingconcentration of the channel material layer 226 is less than that of thedoped well 240 and is much less than the doping concentration of the APTfeature 224 in the present embodiment. Similarly, the doping type of then-type doped well in the second region 214 is same to the doping type ofthe APT feature 232 but the doping concentration of the n-type dopedwell is less than the doping concentration of the APT feature 232. Thedoping type of the channel material layer 234 in the second region 214is same to the doping type of the APT feature 232 but the dopingconcentration of the channel material layer 234 is less than that of thedoped n-type well in the second region and is much less than the dopingconcentration of the APT feature 232 in the present embodiment.

The method 100 may include other alternatives or modifications. In someembodiments, the operations 104-114 to form the first APT features 224in the first region 212 and the operations 116-126 to form the secondAPT features 232 in the second region 214 may have different sequencessuch that the second APT features 232 are formed before the formation ofthe first APT features 224. Particularly, and the operations 116-126 areimplemented before the operations 104-114.

The method 100 further includes other operations before, during and/orafter the operations described above. In some embodiments, thoseannealing processes to drive the dopants from the correspondingdopant-containing layer (as solid phase dopant source) may be designedwith proper thermal profiles with effective diffusion and minimizedthermal budget. Those formed APT features are capable of preventing thetransistors from punch-through effect and also eliminating undesiredimpact of the dopants to the channels, thus the device performance beingenhanced.

The source and drain features may be formed by one or more ionimplantations. The following description using the NMOS transistors asan example, and the formation of the source and drain features of MMOStransistors is similar. In some embodiments, the source and drainfeatures for NMOS transistors are formed by an ion implantationprocedure that includes a first ion implantation to form LDD featuresand a second ion implantation to form S/D features. In otherembodiments, the formation of the gate stacks and the formation of thesource and drain features are integrated in a collective procedure. Infurtherance of the embodiments, the gate stacks are deposited andpatterned; the first ion implantation is applied to the fin activeregions to form LDD features; gate spacers are formed on sidewalls ofthe gate stacks by a suitable process (such as dielectric deposition anddry etching); and the second ion implantation is applied to the finactive regions to form S/D features.

The method 100 further includes an operation to form an interlayerdielectric material (ILD) on the semiconductor structure 200. The ILDincludes one or more dielectric materials, such as silicon oxide, a lowk dielectric material or a combination thereof. In some embodiment, theformation of the ILD includes deposition and CMP.

The method 100 includes an operation to form a multilayerinterconnection structure to couple various devices to form a functionalcircuit. The multilayer interconnection structure includes verticalinterconnects, such as vias or contacts, and horizontal interconnects,such as metal lines. The various interconnection features may implementvarious conductive materials including copper, tungsten, and/orsilicide. In one example, a damascene and/or dual damascene process isused to form a copper related multilayer interconnection structure.

The present disclosure provides a semiconductor structure and a methodmaking the same. The semiconductor structure includes FETs formed on finactive regions and a doping profile with enhanced device performance.Particularly, the method includes forming fin active regions (finfeatures) formed on a semiconductor substrate; recessing the fin activeregions; forming APT features by solid diffusion; and forming a channelmaterial layer by epitaxy growth.

The embodiments of the present disclosure offer advantages over existingart, though it is understood that other embodiments may offer differentadvantages, not all advantages are necessarily discussed herein, andthat no particular advantage is required for all embodiments. Byutilizing the disclosed method and structure, APT feature is formed onthe bottom portion of the fin active region and is extended into thesubstrate. The carrier concentration of the APT feature is independentlytuned to prevent the punch-through effect without degrading the carrierconcentration of the channel region. Especially, the APT features andthe corresponding channel material layer are formed of differentsemiconductor materials for various device benefits, in accordance ofsome embodiments. The APT features in the different fin active regionsare formed on different levels with a further freedom to tune deviceperformances according the design, device type and fin featuredimension. In some embodiments, the source and drain features are formedof a semiconductor material, which is different from that of thecorresponding APT feature, different from that the corresponding channelmaterial layer, or is different from both.

Thus, the present disclosure provides a semiconductor structure. Thesemiconductor structure includes a fin active region formed on asemiconductor substrate and spanning between a first sidewall of a firstshallow trench isolation (STI) feature and a second sidewall of a secondSTI feature; an anti-punch through (APT) feature of a first typeconductivity; and a channel material layer of the first typeconductivity, disposed on the APT feature and having a second dopingconcentration less than the first doping concentration. The APT featureis formed on the fin active region, spans between the first sidewall andthe second sidewall, and has a first doping concentration

The present disclosure provides a semiconductor structure in accordancewith some embodiments. The semiconductor structure includes asemiconductor substrate having a first surface and a second surfaceopposite from each other; a first fin feature and a second fin featureformed on the first surface of the semiconductor substrate; a firstanti-punch through (APT) feature formed on the first fin feature andextending from the first STI feature to the second STI feature; and asecond APT feature formed on the first fin feature and extending fromthe second STI feature to the third STI feature. The first fin featurespans a first width between a first and second shallow trench isolation(STI) features. The second fin feature spans a second width between thesecond STI feature and a third STI feature. The second width is greaterthan the first width. The first APT feature and the second APT featureare disposed with a first distance and a second distance from the secondsurface, respectively, and the second distance being less than thesecond distance.

The present disclosure provides a method for fabricating a semiconductorstructure in accordance with some embodiments. The method includesforming fin features on a semiconductor substrate; recessing the finfeatures by selective etching; forming a solid material layer containinga dopant; driving the dopant from the solid material layer to the finfeatures, thereby forming anti-punch-through (APT) features on the finfeatures, respectively; removing the solid material layer; and forming achannel material layer on the APT features by epitaxy growth.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A device comprising: a first fin active regionextending from a semiconductor substrate; a second fin active regionextending from the semiconductor substrate; a dielectric isolationstructure disposed in the semiconductor substrate between the first finactive region and the second fin active region; a first dopant regiondisposed within the dielectric isolation structure and extending to afirst depth within the dielectric isolation structure; and a seconddopant region disposed within the dielectric isolation structure andextending to a second depth within the dielectric isolation structure,the second depth being different than first depth; a first anti-punchthrough (APT) feature disposed in the first fin active region andinterfacing with the first dopant region; and a second APT featuredisposed in the second fin active region and interfacing with the seconddopant region.
 2. The device of claim 1, wherein the first dopant regionand the second dopant region include the same type of dopant.
 3. Thedevice of claim 1, wherein the first dopant region includes a first-typeof dopant and the second dopant region includes a second-type of dopant,the second-type of dopant being opposite the first-type of dopant. 4.The device of claim 1, further comprising a first semiconductor materiallayer disposed directly on the first APT and the second APT.
 5. Thedevice of claim 1, further comprising a first semiconductor materiallayer disposed directly on the first APT feature and a secondsemiconductor material layer disposed directly on the second APTfeature, the second semiconductor material layer being formed of adifferent material than the first semiconductor material layer.
 6. Thedevice of claim 1, wherein the first APT feature has a first length anda first width, the first length being measured in a directionperpendicular to the first width, wherein the second APT feature has asecond length and a second width, the second length being measured in adirection perpendicular to the second width, and wherein the first widthis the same as the second width and the first length is different thanthe second length.
 7. The device of claim 1, wherein the first andsecond APT features include the same type of dopant.
 8. The device ofclaim 1, wherein the first APT feature includes a first-type of dopantand the second APT feature includes a second-type of dopant that isopposite the first-type of dopant.
 9. A device comprising: a first finactive region and a second fin active region extending from a substrate;a first dielectric isolation structure disposed in the substrate betweenthe first fin active region and the second fin active region; a firstdopant region and a second dopant region disposed within the firstdielectric isolation structure, the second dopant region being spacedapart from the first dopant region; a first anti-punch through (APT)feature disposed in the first fin active region at a first height abovethe substrate; a second APT feature disposed in the second fin activeregion at a second height above the substrate, the second height beingdifferent than the first height; a first semiconductor material layerdisposed on the first APT feature and interfacing with the first dopantregion; and a second semiconductor material layer disposed on the secondAPT feature and interfacing with the second dopant region.
 10. Thedevice of claim 9, further comprising: a first gate stack disposed overthe first semiconductor material layer, the first gate stack including afirst gate dielectric layer and a first gate electrode; and a secondgate stack disposed over the second semiconductor material layer, thesecond gate stack including a second gate dielectric layer and a secondgate electrode.
 11. The device of claim 9, wherein the firstsemiconductor material layer is formed of a different material than thesecond semiconductor material layer.
 12. The device of claim 9, furthercomprising: a third fin active region extending from the substrate; asecond dielectric isolation structure disposed in the substrate betweenthe first fin active region and the third fin active region; a thirddopant region and a fourth dopant region disposed within the seconddielectric isolation structure, the third dopant region being spacedapart from the fourth dopant region; and a third APT feature disposed inthe third fin active region at a third height above the substrate, thethird height being different than the first height;
 13. The device ofclaim 12, wherein the first fin active region has a first lengthmeasured in a direction parallel to a top surface of the substrate,wherein the second fin active region has a second length measured in thedirection parallel to the top surface of the substrate, wherein thethird fin active region has a third length measured in the directionparallel to the top surface of the substrate, and wherein the firstlength, the second length and the third length are all different fromeach other.
 14. The device of claim 9, wherein one of the first dopantregion and the second dopant region extends within the first dielectricisolation structure towards the substrate to a deeper depth than theother of the first dopant region and the second dopant region.
 15. Thedevice of claim 9, wherein the first dopant region includes a first-typeof dopant and the second dopant region includes a second-type of dopant,the second-type being opposite the first-type.
 16. A method comprising:forming a first fin feature having a first width and a second finfeature having a second width on a substrate, the second width beingdifferent than the first width; forming a first anti-punch-through (APT)feature on the first fin feature and forming a second APT feature on thesecond fin feature, the first APT spanning at least the first width ofthe first fin feature and the second APT spanning at least the secondwidth of the second fin feature; and forming a first gate structure overthe first APT feature and a second gate structure over the second APTfeature.
 17. The method of claim 16, wherein forming the first APTfeature on the first fin feature includes forming a first dopantcontaining dielectric layer over the first fin feature and performing afirst thermal process to drive the first dopant into a portion of thefirst fin feature to form the first APT.
 18. The method of claim 17,wherein forming the second APT feature on the second fin featureincludes forming a second dopant containing dielectric layer over thesecond fin feature and performing a second thermal process to drive thesecond dopant into a portion of the second fin feature to form thesecond APT, wherein the second dopant is different from the firstdopant.
 19. The method of claim 17, wherein forming the second APTfeature on the second fin feature includes forming the first dopantcontaining dielectric layer over the second fin feature and performingthe first thermal process to drive the first dopant into a portion ofthe second fin feature to form the second APT.
 20. The method of claim16, wherein after forming the first APT feature on the first finfeature, the first APT feature is positioned at a first height above thesubstrate, and wherein after forming the second APT feature on thesecond fin feature, the second APT feature is positioned at a secondheight above the substrate, the second height being different than thefirst height.